Dr. Tiago Botari Profile

Dr. Tiago Botari

at ASML Netherlands BV

SPIE Involvement:

Author

Publications (2)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 17 June 2024 Presentation + Paper

Quality-diversity driven robust evolutionary optimization of optical designs

Kirill Antonov, Teus Tukker, Tiago Botari, Thomas Bäck, Anna Kononova, Niki van Stein

Proceedings Volume 13023, 130230B (2024) https://doi.org/10.1117/12.3017498

KEYWORDS: Optical design, Mathematical optimization, Lenses, Evolutionary optimization, Objectives, Visualization, Evolutionary algorithms, Tolerancing, Genetic algorithms, Algorithm development

Read Abstract +

Developing optical systems, particularly those consisting of spherical lenses, is relevant for various applications such as lithographic scanners and metrology equipment. The design process of an optical system typically involves the optimization of specific objectives to ensure the best performance. As a common example of such an objective, we consider the problem of determining the lens curvatures that result in a sufficiently small root mean square (RMS) spot size. Optimization algorithms are commonly employed to solve this problem by heuristically eliminating sub-optimal optical designs. This class of algorithms includes the damped least squares (DLS) widely applied in commercial software and advanced methods like Saddle Point Construction. However, within a restricted computational budget, these optimizers are limited in exploring potentially promising novel solutions since they heavily rely on the initial specific designs that must conform to complex or unknown requirements. In this work, we address the considered problem with a modified Hill-Valley Evolutionary Algorithm (HillVallEA), which proved itself as one of the best state-of-the-art metaheuristics for multimodal black-box optimization. We demonstrate that our algorithm locates a diverse set of high-quality optical designs with four lenses in a single run even when initialized with random starting curvatures. This is the first result in this domain when an optimization algorithm that does not take specific optical properties into account can still generate relevant and high-performing optical systems. Furthermore, we show the benefits of the proposed methodology for the diversity of the obtained set of solutions, while maintaining a solution of the same quality as the one found by the most prominent algorithm in the domain. We provide analyses of the obtained solutions according to: 1) tolerance to the alignment of lenses, 2) susceptibility to small variations of lens curvatures.

Proceedings Article | 7 August 2023 Paper

New solutions to Cooke triplet problem via analysis of attraction basins

Kirill Antonov, Tiago Botari, Teuss Tukker, Thomas Bäck, Niki van Stein, Anna Kononova

Proceedings Volume 12624, 126240T (2023) https://doi.org/10.1117/12.2675836

KEYWORDS: Mathematical optimization, Evolutionary algorithms, Optical design, Education and training, Lenses, Optics manufacturing, Algorithm development, Reflection, Lithography, Imaging systems, Nonlinear optimization

Read Abstract +

Optical systems in lithography machines play a significant role in their performance and, therefore, need to be optimized for specific applications. Artificial Intelligence (AI) and, in particular, metaheuristics are utilized in optimization algorithms for finding a diverse set of feasible and high-performing designs. The diversity requirement of the produced solutions is enforced to allow taking into account additional constraints that are difficult to formalize. In this work, we analyse the space of solutions previously produced by a niching evolutionary algorithm for the Cooke Triplet optical system and propose an approximation of the manifold where all high-performing designs exist. First, we show the existence of high-performing optical designs that are structurally different from the 21 previously known theoretical solutions. In order to do this, we develop a general computationally efficient methodology to create a partition of known high-quality points and their (accidentally found) improvements to their corresponding attraction basins, in the case when neither the exact number of landscape attractors nor their locations are known. We construct a manifold estimation which contains high-performing solutions by fitting a Gaussian Process-based classifier which predicts if an arbitrary design is close to high-performing. The proposed approach shows that AI-assisted optimization is beneficial, and it can be used to extend the capabilities of lithographic scanners and metrology equipment. Furthermore, it opens the possibility of studying other industrial applications.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years