Mr. Tianshi Lu Profile

Tianshi Lu

at Tsinghua Univ Shenzhen International Graduate School

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Publications (2)

Proceedings Article | 28 November 2023 Poster + Paper

Analysis and simulation of spatial phase alignment for fabrication of double-layer grating

Shuonan Shan, Tianshi Lu, Fuyuang Deng, Xiaohao Wang, Xinghui Li

Proceedings Volume 12765, 1276524 (2023) https://doi.org/10.1117/12.2691160

KEYWORDS: Optical gratings, Optical alignment, Fabrication, Lithography, Diffraction gratings, Reflection, Overlay metrology, Holography, Finite-difference time-domain method, Stray light

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Proceedings Article | 19 December 2022 Presentation + Paper

A four-step laser interference lithography for patterning pixelated micro-polarizer array

Fuyuan Deng, Tianshi Lu, Qihang Zhai, Linbin Luo, Gaopeng Xue, Qian Zhou, Xiaohao Wang, Xinghui Li

Proceedings Volume 12318, 123182F (2022) https://doi.org/10.1117/12.2643872

KEYWORDS: Photomasks, Photoresist materials, Mirrors, Lithography, Polarization, Interferometers, Electron beam lithography, Laser applications, Optical lithography, Fabrication

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