A conventional one-dimensional model for an electrostatically actuated beam only considers elastic force and
electrostatic force. This paper puts forward a novel method in order to describe the variable cross-section beam. Three
improvements are taken into account. First, the supported force for the cross-section is pondered. Second, the
displacement of each points of the beam deviates from the ideal function. Third, the displacement differs both in x-axis
and y-axis. In addition, there is a mathematic redundancy about integral when the electrostatic force is calculated.
Therefore, a mathematical approximation is proposed, by which the mathematical computation can be remarkably
simplified while the accuracy is ensured. To validate the novel mode, the displacement of mid-point and the resonant
frequency of the beam were calculated as far as these three modifications were concerned. The simulations by a Finite
Element Method (FEM) CoventWare have been compared with the novel model. It is shown that the two-dimensional
(2-D) model for the variable cross-section beam would be useful.
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