We report the integration of a nanomechanical sensor consisting of 16 silicon microcantilevers and polydimethylsiloxane
(PDMS) microfluidics. With our recently developed in-plane photonic transduction method we routinely achieve
microcantilever transduction responsivities in the range of 0.5-1.1 μm-1, which is comparable to the best reported for the
laser reflection readout method used in atomic force microscopy (AFM). Prior work has established that differential
surface stress as low as 0.23 mN/m is readily measurable with our arrays. In this paper we show biotin-streptavidin
sensing with a differential surface stress of ~2.3 mN/m as a first step toward characterizing integrated microcantilever
array/microfluidic sensors.
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