Mr. Timo Oberbiermann Profile

Timo Oberbiermann

at Heidelberg Instruments Mikrotechnik GmbH

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Publications (2)

Proceedings Article | 9 April 2024 Poster + Paper

Assessing hybrid polymers as innovative photolithography material allowing advanced high aspect ratio/high resolution patterns for micro-optics and patterned passivation layers

M. Russew, A. Benker, J. Herrmann, T. Oberbiermann, S. Grützner, M. Koch, J. Wolf, A. Voigt, A. Schleunitz, G. Grützner

Proceedings Volume 12956, 129560R (2024) https://doi.org/10.1117/12.3010843

KEYWORDS: Polymers, Advanced patterning, Film thickness, Two photon polymerization, Passivation, Optical lithography, Micro optics, Liquids, Manufacturing, Lithography

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Proceedings Article | 21 August 2020 Presentation + Paper

Inverse designed flat optics with multilevel diffractive lenses

Sourangsu Banerji, Monjurul Meem, Apratim Majumder, Juan Garcia, Philip Hon, Christian Pies, Timo Oberbiermann, Rajesh Menon, Berardi Sensale Rodriguez

Proceedings Volume 11482, 114820H (2020) https://doi.org/10.1117/12.2568141

KEYWORDS: Modulation transfer functions, Point spread functions, Near infrared, Long wavelength infrared, Lenses, Infrared radiation, Infrared imaging, Diffraction, Visible radiation

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