Dr. Timothy J. Dalton
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 September 2001 Paper
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Oxides, Thin films, Lithography, Etching, Dielectrics, Silicon, Scanning electron microscopy, Photomasks, Reactive ion etching, Photoresist processing

Proceedings Article | 14 September 2001 Paper
Proc. SPIE. 4346, Optical Microlithography XIV
KEYWORDS: Lithography, Etching, Resistance, Printing, Photoresist materials, Photomasks, Optical proximity correction, Photoresist processing, Semiconducting wafers, 193nm lithography

Proceedings Article | 18 December 1998 Paper
Proc. SPIE. 3539, Chemical Microsensors and Applications
KEYWORDS: Optical fibers, Fiber optics, Sensors, Etching, Polymers, Reflectivity, Fiber optics sensors, Refraction, Plasma etching, Plasma

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