Dr. Tohru Matsuura Profile

Dr. Tohru Matsuura

at NTT Photonics Labs

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Proceedings Article | 15 October 2004 Paper

Optical waveguides using perfluorinated polyimides and their optical device applications

Tohru Matsuura

Proceedings Volume 5517, (2004) https://doi.org/10.1117/12.560438

KEYWORDS: Waveguides, Fluorine, Refractive index, Near field optics, Wavelength division multiplexing, Telecommunications, Local area networks, Thin films, Video, Absorption

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Buried optical waveguides were fabricated using perfluorinated polyimides (FLUPI-PFs) and their optical properties evaluated. These polyimides have excellent optical transparency in the near-infrared wavelength region for optical telecommunications, because there are no carbon-hydrogen bonds that absorb light in that region. They also have high thermal stability and allow precise refractive index control. The buried waveguides were fabricated using the two perfluorinated polyimides with a different refractive index as the core and cladding materials by spin-casting, conventional photolithographic patterning, and reactive ion etching using oxgen. The waveguides are single-mode and have losses below 0.2 dB/cm in the broad near-infrared wavelength region. A waveguide with a refractive index difference between the core and cladding of 0.5% has a minimum curvature radius of 10 mm. The waveguides were investigated for use as telecommunications components by fabricating a thin film filter-embedded 4-channel coarse wavelength-division multiplexer/demultiplexer with channel spacing of 40 nm and center wavelength of 1470 - 1590 nm. The insertion loss and the crosstalk for each port are less than 5.0 dB and better than -17 dB, respectively. A wavelength-division mutiplexing video transmission system using the fabricated multiplexer/demultiplexers was constructed for use in a local area network.

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