CONFERENCE PROCEEDINGS
Advanced Search
Tohru Sasaki
at Sony Semiconductor Manufacturing Corp
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 24 March 2006 Paper
An in-line image quality monitoring system for imaging device fabrication using automated macro-inspection
Tohru Sasaki, Kunihiko Hikichi, Dai Sugimoto, Nozomu Izumi, Mitsuru Uda, Atsushi Kohayase, Hiroshi Yamashita
Proceedings Volume 6152, 61522W (2006) https://doi.org/10.1117/12.656151
KEYWORDS: Semiconducting wafers, Charge-coupled devices, Imaging devices, Image quality, Imaging systems, Wafer-level optics, Image filtering, Inspection, Critical dimension metrology, Quality systems
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top