Prof. Tomosumi Kamimura Profile

Prof. Tomosumi Kamimura

Professor at Osaka Institute of Technology

SPIE Involvement:

Author

Publications (33)

Proceedings Article | 24 November 2023 Poster

Contamination examination using laser damage morphology on fused silica polished with magnetic field-assisted finishing

Julian Long, Yuya Tsunezuka, Motoya Kurosaki, Tomosumi Kamimura, Ryohei Yasukuni, Hitomi Yamaguchi

Proceedings Volume PC12726, PC1272611 (2023) https://doi.org/10.1117/12.2685249

KEYWORDS: Polishing, Contamination, Surface finishing, Silica, Laser damage threshold, Magnetism, Laser induced damage, Ultraviolet radiation, Optical surfaces

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Proceedings Article | 12 October 2021 Poster + Presentation

Analysis for damaged surface of Fused Silica with enhanced damage resistance after Magnetic Field-Assisted Finishing

Akito Uemura, Haruki Marui, Yuya Tsunezuka, Daichi Shima, Tomosumi Kamimura, Julian Long, Kristina Merino, Hitomi Yamaguchi

Proceedings Volume 11910, 119101P (2021) https://doi.org/10.1117/12.2598665

KEYWORDS: Surface finishing, Silica, Magnetism, Resistance, Polishing, Surface roughness, Contamination, Ultraviolet radiation, Optical components, Nd:YAG lasers

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Proceedings Article | 12 October 2021 Poster + Presentation

Degradation phenomena and photo luminescence for silica glass irradiated with 266 nm-laser

Atsushi Koizumi, Akito Uemura, Yuki Matsumoto, Tomosumi Kamimura, Nobu Kuzuu, Hideharu Horikoshi

Proceedings Volume 11910, 119101D (2021) https://doi.org/10.1117/12.2598664

KEYWORDS: Silica, Glasses, Luminescence, Laser irradiation, Ultraviolet radiation, Spectroscopy, Pulsed laser operation, Plasma, Laser induced damage

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Proceedings Article | 12 October 2021 Poster + Presentation

Evaluation of surface damage resistance in several polished conditions for SrB4O7 crystal

Haruki Marui, Sora Aikawa, Yuji Umeda, Yusuke Funamoto, Tomosumi Kamimura, Yasunori Tanaka, Ryota Murai, Yoshinori Takahashi, Tsuyoshi Sugita, Masayuki Imanishi, Yusuke Mori, Masashi Yoshimura

Proceedings Volume 11910, 119101O (2021) https://doi.org/10.1117/12.2598554

KEYWORDS: Surface finishing, Crystals, Polishing, Resistance, Laser induced damage, Deep ultraviolet, Silica, Nonlinear crystals, Laser crystals, Transparency

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Proceedings Article | 12 October 2021 Poster + Presentation

High-speed imaging of photoresist stripping phenomena induced by laser irradiation without causing the laser damage

Yuki Matsumoto, Naoki Nishioka, Atsushi Koizumi, Akito Uemura, Ryosuke Nakamura, Masashi Yoshimura, Hideo Horibe, Tomosumi Kamimura

Proceedings Volume 11910, 119101C (2021) https://doi.org/10.1117/12.2598555

KEYWORDS: Laser irradiation, Laser induced damage, Photoresist materials, High speed imaging, Pulsed laser operation, Silicon, Semiconducting wafers, Photoresist processing, Laser imaging, Semiconductors

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Proceedings Article | 22 September 2014 Paper

Scanning removal of ion-implanted novolak resist by using a laser irradiation

Tomosumi Kamimura, Yuta Kuroki, Takuya Kiriyama, Hiroki Muraoka, Takashi Nishiyama, Yoshiyuki Harada, Hiroyuki Kuramae, Hideo Horibe

Proceedings Volume 9238, 92380J (2014) https://doi.org/10.1117/12.2073477

KEYWORDS: Silicon, Semiconducting wafers, Laser irradiation, Ions, Laser induced damage, Wafer-level optics, Pulsed laser operation, Absorbance, Laser damage threshold, Absorption

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Proceedings Article | 4 December 2012 Paper

Laser removal of positive-tone diazonaphthoquinone / novolak resist without occurring laser-induced damage to the silicon wafer

Hiroki Muraoka, Tomosumi Kamimura, Yuki Yamana, Yoshiaki Matsura, Hideo Horibe

Proceedings Volume 8530, 85301V (2012) https://doi.org/10.1117/12.977338

KEYWORDS: Silicon, Semiconducting wafers, Laser irradiation, Laser damage threshold, Laser induced damage, Near infrared, Visible radiation, Laser energy, Semiconductor lasers, Nd:YAG lasers

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Proceedings Article | 30 December 2008 Paper

Investigation of bulk laser damage in transparent YAG ceramics controlled with microstructural refinement

T. Kamimura, Y. Kawaguchi, T. Arii, W. Shirai, T. Mikami, T. Okamoto, Yan Lin Aung, A. Ikesue

Proceedings Volume 7132, 713215 (2008) https://doi.org/10.1117/12.804416

KEYWORDS: Ceramics, YAG lasers, Laser induced damage, Scattering, Nd:YAG lasers, Crystals, Laser scattering, Laser crystals, Laser damage threshold, Bulk lasers

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Proceedings Article | 7 February 2006 Paper

Optical quality and laser performance of polycrystal and single crystal Nd:YAG by sintering method

A. Ikesue, Yan Lin Aung, T. Yoda, S. Nakayama, T. Kamimura, K. Yoshida

Proceedings Volume 5991, 599122 (2006) https://doi.org/10.1117/12.638721

KEYWORDS: Crystals, Nd:YAG lasers, Ceramics, Laser crystals, YAG lasers, Composites, Neodymium, Laser scattering, Interfaces, Spherical lenses

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Proceedings Article | 21 February 2005 Paper

Enhancement of surface damage resistance by selective chemical removal of CeO₂

Tomosumi Kamimura, Shinji Motokoshi, Takayasu Sakamoto, Takahisa Jitsuno, Haruya Shiba, Shigenori Akamatsu, Hideo Horibe, Takayuki Okamoto, Kunio Yoshida

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.585219

KEYWORDS: Surface finishing, Laser induced damage, Polishing, Laser damage threshold, Silica, Resistance, Contamination, Laser applications, Cerium, Surface roughness

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Proceedings Article | 21 February 2005 Paper

All ceramic composite with layer by layer structure by advanced ceramic technology

Kunio Yoshida, Hirokazu Ishii, Takahiro Kumada, Tomosumi Kamimura, Akio Ikesue, Takayuki Okamoto

Proceedings Volume 5647, (2005) https://doi.org/10.1117/12.585025

KEYWORDS: Ceramics, Composites, Nd:YAG lasers, YAG lasers, Polishing, Diffusion, Aluminum, Neodymium, Laser applications, Crystals

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Proceedings Article | 10 June 2004 Paper

Laser-induced bulk damage of impurity-doped silica glasses (Abstract Only)

Kunio Yoshida, Y. Tsuboi, S. Yamagishi, Kanyoshi Ochi, S. Kuzuu, Tomosumi Kamimura, Akira Fujinoki, Takayuki Okamoto

Proceedings Volume 5273, (2004) https://doi.org/10.1117/12.524858

KEYWORDS: Silica, Laser induced damage, Glasses, Bulk lasers, Information operations, Deep ultraviolet, Lithography, Absorption, Laser applications, Laser damage threshold

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Proceedings Article | 10 June 2004 Paper

Investigation of bulk laser damage and absorption of laser light in CsLiB6O10 crystals (Abstract Only)

Tomosumi Kamimura, Masashi Yamamoto, Shigenori Akamatsu, Muneyuki Nishioka, Masashi Yoshimura, Yusuke Mori, Takatomo Sasaki, Kunio Yoshida

Proceedings Volume 5273, (2004) https://doi.org/10.1117/12.524643

KEYWORDS: Crystals, Laser crystals, Ultraviolet radiation, Absorption, Solid state lasers, Nonlinear crystals, Laser induced damage, High power lasers, Bulk lasers, Solid state electronics

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Proceedings Article | 10 June 2004 Paper

Enhancement of surface-damage resistance by removing subsurface damage in fused silica

Tomosumi Kamimura, Shigenori Akamatsu, Masashi Yamamoto, Ichiro Yamato, Haruya Shiba, Shinji Motokoshi, Takayasu Sakamoto, Takahisa Jitsuno, Takayuki Okamoto, Kunio Yoshida

Proceedings Volume 5273, (2004) https://doi.org/10.1117/12.524961

KEYWORDS: Surface finishing, Polishing, Silica, Etching, Ion beams, Resistance, Laser damage threshold, Wet etching, Laser induced damage, Surface roughness

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Proceedings Article | 30 May 2003 Paper

Optical characteristics of THV fluorothermoplastic (Abstract Only)

Kunio Yoshida, Takuo Nobori, K. Hatooka, Kanyoshi Ochi, M. Sunagawa, Tomosumi Kamimura, Yoshiaki Okamoto

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472404

KEYWORDS: Laser induced damage, Communication engineering, Polymers, Antireflective coatings, Crystals, Crystal optics, Optical coatings, Refractive index, Laser damage threshold, Laser optics

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Proceedings Article | 30 May 2003 Paper

Dependence of surface damage resistance on bulk quality in CsLiB6O10 (CLBO) crystal

Tomosumi Kamimura, Satoru Fukumoto, Munenori Nishioka, Masashi Yoshimura, Yusuke Mori, Takatomo Sasaki, Kunio Yoshida

Proceedings Volume 4932, (2003) https://doi.org/10.1117/12.472386

KEYWORDS: Crystals, Resistance, Etching, Ion beams, Ultraviolet radiation, Laser crystals, Surface finishing, Laser induced damage, Electrical engineering, Solid state lasers

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Proceedings Article | 9 April 2002 Paper

Optical properties of porous fluoride coating for UV and DUV lasers

K. Yoshida, M. Ohya, K. Hatooka, Kanyoshi Ochi, M. Sunagawa, Tomosumi Kamimura

Proceedings Volume 4679, (2002) https://doi.org/10.1117/12.461692

KEYWORDS: Antireflective coatings, Magnesium fluoride, Coating, Ultraviolet radiation, Deep ultraviolet, Silica, Laser induced damage, Thin films, Laser damage threshold, Reflectivity

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Proceedings Article | 25 February 2002 Paper

Highly reliable high-power 266-nm all-solid-state UV laser

Tetsuo Kojima, Susumu Konno, Shuichi Fujikawa, Masaki Seguchi, Yushi Takenaka, Koji Yasui, Tomosumi Kamimura, Masashi Yoshimura, Yusuke Mori, Takatomo Sasaki, Mitsuhiro Tanaka, Yukikatsu Okada

Proceedings Volume 4426, (2002) https://doi.org/10.1117/12.456902

KEYWORDS: Ultraviolet radiation, Crystals, Laser crystals, High power lasers, Laser applications, Semiconductor lasers, Polishing, Resonators, Laser systems engineering, Laser processing

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Proceedings Article | 12 April 2001 Paper

Laser-induced damage of fluoride coatings for UV lasers

K. Yoshida, M. Ohya, K. Yagi, Toshimasa Matsuoka, Kanyoshi Ochi, M. Sunagawa, Tomosumi Kamimura

Proceedings Volume 4347, (2001) https://doi.org/10.1117/12.425066

KEYWORDS: Ultraviolet radiation, Laser induced damage, Antireflective coatings, Laser applications, Deep ultraviolet, Silica, Magnesium fluoride, Micromachining, Thin films, Optical components

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Proceedings Article | 12 April 2001 Paper

Bulk laser damage in borate crystals for high-power all-solid-state UV lasers

Tomosumi Kamimura, Riichi Ono, Y. Yap, Masashi Yoshimura, Yoshinobu Mori, Takatomo Sasaki, T. Tsuru, Tomoya Ogawa, Hidetsugu Yoshida, Masahiro Nakatsuka, K. Yoshida

Proceedings Volume 4347, (2001) https://doi.org/10.1117/12.425062

KEYWORDS: Crystals, Ultraviolet radiation, Laser crystals, Bulk lasers, High power lasers, Solid state lasers, Solid state electronics, Nonlinear crystals, Light scattering, Laser damage threshold

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Proceedings Article | 3 April 2000 Paper

Optical properties and laser damage of thin films deposited by reactive rf-magnetron sputtering

Kunio Yoshida, Noriaki Tochio, M. Ohya, Kanyoshi Ochi, Schukichi Kaku, Tomosumi Kamimura, Hidetsugu Yoshida

Proceedings Volume 3889, (2000) https://doi.org/10.1117/12.380866

KEYWORDS: Surface roughness, Ions, Etching, Thin films, Silica, Optical coatings, Glasses, Polishing, Laser induced damage, Thin film coatings

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Proceedings Article | 3 April 2000 Paper

Improvement of surface laser damage resistance in CsLiB6O10 crystal for high-power UV lasers

Tomosumi Kamimura, Kazuhito Nakai, Masashi Yoshimura, Yusuke Mori, Takatomo Sasaki, Yukikatsu Okada, Hidetsugu Yoshida, Masahiro Nakatsuka, Tetsuo Kojima, Kunio Yoshida

Proceedings Volume 3889, (2000) https://doi.org/10.1117/12.380917

KEYWORDS: Surface finishing, Ion beams, Etching, Polishing, Crystals, Resistance, Laser crystals, Ultraviolet radiation, Nd:YAG lasers, Laser induced damage

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Proceedings Article | 3 March 2000 Paper

Laser-induced damage in nonlinear crystals on irradiation direction and polarization

Hidetsugu Yoshida, Takahisa Jitsuno, Hisanori Fujita, Masahiro Nakatsuka, Tomosumi Kamimura, Masashi Yoshimura, Takatomo Sasaki, Akio Miyamoto, Kunio Yoshida

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379300

KEYWORDS: Crystals, Nonlinear crystals, Laser damage threshold, Laser crystals, Laser induced damage, Polarization, Laser irradiation, Frequency converters, Ferroelectric materials, High power lasers

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Proceedings Article | 3 March 2000 Paper

Laser damage durability in borate crystals for high-power all solid state UV lasers (Abstract Only)

Tomosumi Kamimura, Hiroyuki Furuya, I. Yamada, Kazuhito Nakai, Masashi Yoshimura, Y. Yap, Yusuke Mori, Takatomo Sasaki, Hidetsugu Yoshida, Masahiro Nakatsuka, M. Tanaka, Yukikatsu Okada, Kunio Yoshida

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379301

KEYWORDS: Surface finishing, Ultraviolet radiation, Polishing, Crystals, Solid state lasers, Laser induced damage, High power lasers, Laser crystals, Nonlinear crystals, Solid state physics

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Proceedings Article | 3 March 2000 Paper

Laser-induced damage of overcoated materials at high humidity

Kunio Yoshida, Noriaki Tochio, M. Ohya, Toshimasa Matsuoka, K. Yagi, Kanyoshi Ochi, Schukichi Kaku, Tomosumi Kamimura, Nobu Kuzuu

Proceedings Volume 3902, (2000) https://doi.org/10.1117/12.379298

KEYWORDS: Thin films, Humidity, Silica, Glasses, Laser induced damage, Thin film deposition, Adaptive optics, Laser damage threshold, Eye, Microscopes

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Proceedings Article | 23 July 1999 Paper

Laser-induced damage of silica glass at 1064 nm and its higher harmonics

Kunio Yoshida, Nobu Kuzuu, Takahisa Jitsuno, Hidetsugu Yoshida, Tomosumi Kamimura

Proceedings Volume 3492, (1999) https://doi.org/10.1117/12.354233

KEYWORDS: Absorption, Silica, Laser induced damage, Glasses, Excimer lasers, Chlorine, Ultraviolet radiation, Laser damage threshold, Silicon, Molecules

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Proceedings Article | 7 April 1999 Paper

Improvement of laser-induced surface damage in UV optics by ion beam etching (CsLiB6O10 and fused silica)

Tomosumi Kamimura, Kazuhito Nakai, Yusuke Mori, Takatomo Sasaki, Hidetsugu Yoshida, Masahiro Nakatuka, Mitsuhiro Tanaka, S. Toda, M. Tanaka, Kunio Yoshida

Proceedings Volume 3578, (1999) https://doi.org/10.1117/12.344405

KEYWORDS: Surface finishing, Ion beams, Etching, Polishing, Silica, Surface roughness, Laser induced damage, Ultraviolet radiation, Resistance, Crystals

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Proceedings Article | 7 April 1999 Paper

Ultraviolet laser damage and optical properties of thin films deposited by reactive-rf-magnetron sputtering (Abstract Only)

Kunio Yoshida, Takeshi Kamiya, Noriaki Tochio, Kanyoshi Ochi, Schukichi Kaku, Tomosumi Kamimura, Hidetsugu Yoshida, Tsuyoshi Okamoto

Proceedings Volume 3578, (1999) https://doi.org/10.1117/12.344459

KEYWORDS: Sputter deposition, Laser induced damage, Thin film deposition, Thin films, Ultraviolet radiation, Optical properties, Optical coatings, Humidity, Laser damage threshold, Zirconium dioxide

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Proceedings Article | 20 April 1998 Paper

Improvement of laser-induced surface damage in CsLiB6O10 crystal by ion etching

Tomosumi Kamimura, Masashi Yoshimura, Takahiro Inoue, Yusuke Mori, Takatomo Sasaki, Hidetsugu Yoshida, Masahiro Nakatsuka, Kunio Yoshida, Kyoichi Deki, Masahiro Horiguchi

Proceedings Volume 3244, (1998) https://doi.org/10.1117/12.307000

KEYWORDS: Ions, Etching, Crystals, Laser crystals, Surface finishing, Laser induced damage, Polishing, Nd:YAG lasers

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Proceedings Article | 20 April 1998 Paper

Bulk laser damage in CsLiB6O10 crystal

Masashi Yoshimura, Tomosumi Kamimura, Kouki Murase, Takahiro Inoue, Yusuke Mori, Takatomo Sasaki, Hidetsugu Yoshida, Masahiro Nakatsuka

Proceedings Volume 3244, (1998) https://doi.org/10.1117/12.306999

KEYWORDS: Bulk lasers, Crystals, Laser crystals, Q switched lasers, Nd:YAG lasers, Laser damage threshold, Laser irradiation, Polarization, Fused quartz

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Proceedings Article | 20 April 1998 Paper

Wavelength dependence of laser-induced damage in fused silica and fused quartz

Kunio Yoshida, Nobuhiro Umemura, Nobu Kuzuu, Hidetsugu Yoshida, Tomosumi Kamimura, Takatomo Sasaki

Proceedings Volume 3244, (1998) https://doi.org/10.1117/12.306979

KEYWORDS: Silica, Laser induced damage, Fused quartz, Chlorine, Laser damage threshold, Vitreous, Absorption, Molecules

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Proceedings Article | 13 May 1997 Paper

Optical properties of thin films deposited by reactive-Rf-magnetron sputtering

Kunio Yoshida, Tomosumi Kamimura, Kanyoshi Ochi, Schukichi Kaku, Hidetsugu Yoshida, Hisanori Fujita, F. Tani, M. Sunagawa, Takayuki Okamoto

Proceedings Volume 2966, (1997) https://doi.org/10.1117/12.274285

KEYWORDS: Thin films, Sputter deposition, Optical properties, Thin film deposition, Optical coatings, Humidity, Electronics engineering, Laser engineering, Surface roughness

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Proceedings Article | 27 May 1996 Paper

In-situ optical coatings on subsurface damage-removed substrate

Kunio Yoshida, T. Hirao, Tomosumi Kamimura, Kanyoshi Ochi, Schukichi Kaku, Hidetsugu Yoshida, Hisanori Fujita, F. Tani, M. Sunagawa, Yoshiaki Okamoto

Proceedings Volume 2714, (1996) https://doi.org/10.1117/12.240412

KEYWORDS: Optical coatings, Glasses, Silica, Etching, Ion beams, Surface roughness, Silicon, Argon, Laser damage threshold, Polishing

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Showing 5 of 33 publications

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