Dr. Torsten Feigl
CEO at optiX fab GmbH
SPIE Involvement:
Author
Publications (47)

Proceedings Article | 6 July 2018 Paper
Proc. SPIE. 10699, Space Telescopes and Instrumentation 2018: Ultraviolet to Gamma Ray
KEYWORDS: Reflectivity, Multilayers, Extreme ultraviolet, Vacuum ultraviolet, Mirrors, Solar processes, Spectrographs, Stochastic processes, Boron

Proceedings Article | 19 March 2018 Presentation + Paper
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Diffusers, Extreme ultraviolet, Scanners, Scattering, Extreme ultraviolet lithography, Molybdenum

Proceedings Article | 16 March 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Extreme ultraviolet, Reflectivity, Mirrors, Optical filters, Binary data, Carbon dioxide lasers, Diffraction, Infrared radiation, Multilayers, Spherical lenses

Proceedings Article | 3 May 2013 Paper
Proc. SPIE. 8777, Damage to VUV, EUV, and X-ray Optics IV; and EUV and X-ray Optics: Synergy between Laboratory and Space III
KEYWORDS: Extreme ultraviolet, Mirrors, Laser damage threshold, Wavefronts, Beam splitters, Reflectivity, Silicon, Multilayers, Reflection, Plasma

Proceedings Article | 1 April 2013 Paper
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Mirrors, Reflectivity, Multilayers, Extreme ultraviolet, Plasma, Extreme ultraviolet lithography, Optical coatings, Light sources, EUV optics, Tin

Showing 5 of 47 publications
Conference Committee Involvement (1)
Optical Constants of Materials for UV to X-Ray Wavelengths
4 August 2004 | Denver, Colorado, United States
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