Torsten Kiessling
at Fraunhofer IPMS
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 January 2004 Paper
Proc. SPIE. 5346, MOEMS and Miniaturized Systems IV
KEYWORDS: Mirrors, Micromirrors, Electrodes, Etching, Silicon, Semiconducting wafers, Oxides, Beam splitters, Electroluminescence, Adhesives

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