Prof. Toshiyuki Horiuchi Profile

Prof. Toshiyuki Horiuchi

Professor at Tokyo Denki Univ

SPIE Involvement:

Author

Publications (24)

Proceedings Article | 27 August 2024 Paper

Projection exposure on inner surfaces of cylindrical pipes using a cone mirror

Kenji Shintani, Shotaro Hattori, Kenji Kobayashi, Toshiyuki Horiuchi, Hiroshi Kobayashi

Proceedings Volume 13177, 131770Y (2024) https://doi.org/10.1117/12.3032250

KEYWORDS: Pipes, Mirror surfaces, Reticles, Conical mirrors, Printing, Optical surfaces

Read Abstract +

Proceedings Article | 26 August 2024 Paper

Projection lithography using 125-µm square optical fibers and an LED matrix

Shota Yoda, Kazuki Fukuda, Kazumori Yoshida, Fuga Yoshida, Jun-ya Iwasaki, Toshiyuki Horiuchi, Hiroshi Kobayashi

Proceedings Volume 13177, 131770Z (2024) https://doi.org/10.1117/12.3032437

KEYWORDS: Matrices, Light emitting diodes, Optical fibers, Printing, Semiconducting wafers, Projection lithography, Optical lithography, Light sources, Lithography

Read Abstract +

Proceedings Article | 26 August 2024 Paper

Applicability of projection exposure using a gradient-index lens array to thick resist patterning of more than 100-um

Toshiyuki Horiuchi, Naoyuki Otsuka, Takeharu Fukuhara, Hiroshi Kobayashi

Proceedings Volume 13177, 131770E (2024) https://doi.org/10.1117/12.3030657

KEYWORDS: Lens arrays, GRIN lenses, Optical lithography, Printing, Reticles, Projection lithography, Lithography

Read Abstract +

Proceedings Article | 29 September 2023 Paper

Present situation of research on stereophonic lithography using a pair of parabolic mirrors

Toshiyuki Horiuchi, Jun-ya Iwasaki, Hiroshi Kobayashi

Proceedings Volume 12915, 129150I (2023) https://doi.org/10.1117/12.2683770

KEYWORDS: Reticles, Parabolic mirrors, Printing, Lithography, Light sources and illumination, Optical lithography, Structural health monitoring

Read Abstract +

Proceedings Article | 23 August 2021 Paper

Stereophonic projection lithography using parabolic mirrors

Toshiyuki Horiuchi, Hiroshi Kobayashi

Proceedings Volume 11908, 1190808 (2021) https://doi.org/10.1117/12.2597232

Read Abstract +

Proceedings Article | 27 June 2019 Paper

Design and investigation of a maskless lithography system for printing patterns on the inside surface of a long pipe

Toshiyuki Horiuchi, Kousuke Akitani, Kazumi Imahashi, Yuta Suzuki, Jun-ya Iwasaki, Hiroshi Kobayashi, Akira Yanagida

Proceedings Volume 11178, 1117803 (2019) https://doi.org/10.1117/12.2532442

KEYWORDS: Optical fibers, Lithography, Printing, Light emitting diodes, Optical design, Optical lithography, Maskless lithography

Read Abstract +

Proceedings Article | 22 May 2018 Paper

Effectiveness of fine-pitch lenticular lens arrays fabricated using projection lithography for improving resolution and clearness in switching of two pictures

Toshiyuki Horiuchi, Maiko Kurata, Satoshi Miyazawa, Yuta Morizane

Proceedings Volume 10675, 106750Q (2018) https://doi.org/10.1117/12.2305690

KEYWORDS: Lenticular lenses, Switching, Reticles, Quartz, Projection lithography, Printing, Lenses, Image segmentation, Optical fibers, Transmittance

Read Abstract +

Proceedings Article | 20 March 2018 Paper

Evaluation of resist molds formed for fabricating micro-lens arrays and practicability of replicated epoxy resin lenses

Toshiyuki Horiuchi, Noa Kobayashi, Ryunosuke Sasaki

Proceedings Volume 10587, 105871M (2018) https://doi.org/10.1117/12.2307043

KEYWORDS: Ray tracing, Lenses, Projection lithography, 3D profilers

Read Abstract +

Proceedings Article | 16 October 2017 Presentation + Paper

Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching

Kaiki Ito, Yuta Suzuki, Toshiyuki Horiuchi

Proceedings Volume 10451, 104510G (2017) https://doi.org/10.1117/12.2284735

KEYWORDS: Reticles, Lithography, Etching, Wet etching, Optical lithography, Printing, Lamps, Cylindrical lenses, 3D scanning, Photomasks

Read Abstract +

Proceedings Article | 16 October 2017 Paper

Laser-scan lithography and electrolytic etching for fabricating mesh structures on stainless-steel pipes 100 um in diameter

Hiroshi Takahashi, Toshiyuki Horiuchi

Proceedings Volume 10451, 104511I (2017) https://doi.org/10.1117/12.2280384

KEYWORDS: Etching, Lithography, Optical lithography, Edge roughness, Scientific research

Read Abstract +

Proceedings Article | 5 September 2017 Presentation + Paper

Visualization of diffusion mixing in a micro-mixer with flow paths fabricated by photolithography

Toshiyuki Horiuchi, Yuta Morizane

Proceedings Volume 10372, 1037206 (2017) https://doi.org/10.1117/12.2272903

KEYWORDS: Diffusion, Visualization, Liquids, Lithography, Epoxies, Optical lithography, Visual analytics, Chemical analysis

Read Abstract +

Proceedings Article | 13 July 2017 Paper

Electrolytic etching of fine stainless-steel pipes patterned by laser-scan lithography

Hiroshi Takahashi, Tomoya Sagara, Toshiyuki Horiuchi

Proceedings Volume 10454, 1045411 (2017) https://doi.org/10.1117/12.2277823

KEYWORDS: Etching, Lithography, Projection systems, Aluminum, Ultrasonics

Read Abstract +

Proceedings Article | 13 July 2017 Paper

Research on fabrication of resist mold patterns for electroplating

Kouta Shimizu, Yuhto Nishida, Toshiyuki Horiuchi

Proceedings Volume 10454, 1045412 (2017) https://doi.org/10.1117/12.2277819

KEYWORDS: Semiconducting wafers, Printing, Optical lithography, Electroplating

Read Abstract +

Proceedings Article | 13 July 2017 Paper

Fabrication of cylindrical micro-parts using synchronous rotary scan-projection lithography and chemical etching

Kaiki Ito, Yuta Suzuki, Toshiyuki Horiuchi

Proceedings Volume 10454, 1045410 (2017) https://doi.org/10.1117/12.2277818

KEYWORDS: Lithography, Wet etching, Optical lithography, Printing

Read Abstract +

Proceedings Article | 16 May 2017 Paper

Fabrication of long linear arrays of plastic optical fibers with squared ends for the use of code mark printing lithography

Toshiyuki Horiuchi, Jun Watanabe, Yuta Suzuki, Jun-ya Iwasaki

Proceedings Volume 10232, 102320D (2017) https://doi.org/10.1117/12.2265001

KEYWORDS: Light emitting diodes, Polymer optical fibers, Lithography, Printing, Optical fibers, Optical arrays, Heat treatments, Optical lithography, LCDs, Lamps, Aluminum, Transmittance, Polishing

Read Abstract +

Proceedings Article | 10 May 2016 Paper

Laser-Scan Lithography onto Ultra-Fine Pipes 100 μm in diameter

Hiroshi Takahashi, Tomoya Sagara, Toshiyuki Horiuchi

Proceedings Volume 9984, 99840J (2016) https://doi.org/10.1117/12.2240158

KEYWORDS: Lithography, Etching, Photomasks, Objectives, Laser systems engineering, Printing, Light sources, Projection systems, Metals, Sputter deposition

Read Abstract +

Proceedings Article | 10 May 2016 Paper

Synchronous scan-projection lithography for fabricating cylindrical micro-parts

Kaiki Ito, Yuta Suzuki, Toshiyuki Horiuchi

Proceedings Volume 9984, 99840I (2016) https://doi.org/10.1117/12.2240273

KEYWORDS: Lithography, Reticles, Optical lithography, Printing, 3D scanning, Photomasks, Current controlled current source, Light sources, Mercury

Read Abstract +

Proceedings Article | 10 May 2016 Paper

Technology for fabricating micro-lens arrays utilizing lithographically replicated concave resist patterns

Noa Kobayashi, Ryunosuke Sasaki, Toshiyuki Horiuchi

Proceedings Volume 9984, 99840H (2016) https://doi.org/10.1117/12.2240157

KEYWORDS: Projection lithography, Epoxies, Semiconducting wafers, Polishing, Silicon, Optical lithography, Lithography, Printing, Adhesives, Transmittance, Reticles

Read Abstract +

Proceedings Article | 25 March 2016 Paper

Enhancing the Novolak resin resist resolution by adding phenol to fractionated resin

Atsushi Sekiguchi, Yoko Matsumoto, Hatsuyuki Tanaka, Toshiyuki Horiuchi, Yoshihisa Sensu, Satoshi Takei, Makoto Hanabata

Proceedings Volume 9779, 97791L (2016) https://doi.org/10.1117/12.2218948

KEYWORDS: Picture Archiving and Communication System, Lithography, Astatine, Optical lithography, Flat panel displays, Microelectromechanical systems, Electroluminescence, Solids, Manufacturing, Photoresist processing

Read Abstract +

Proceedings Article | 9 July 2015 Paper

Readability of intentionally degraded two dimensional code marks printed lithographically using a squared optical fiber matrix

Jun Watanabe, Jun-ya Iwasaki, Toshiyuki Horiuchi

Proceedings Volume 9658, 965817 (2015) https://doi.org/10.1117/12.2192647

KEYWORDS: Light emitting diodes, Semiconducting wafers, Optical fibers, Mercury, Lamps, Lithography, Printing, Prototyping, Polymer optical fibers, Light sources and illumination

Read Abstract +

Proceedings Article | 9 July 2015 Paper

Investigation into causes of resolution degradation in projection exposure using a gradient-index lens array

Takanori Sato, Toshiyuki Horiuchi

Proceedings Volume 9658, 965815 (2015) https://doi.org/10.1117/12.2192973

KEYWORDS: GRIN lenses, Lithography, Reticles, Optical lithography, Semiconducting wafers, Flex printed circuits, Flexible circuits, Microfluidics, Contact lenses, Printing

Read Abstract +

Proceedings Article | 9 July 2015 Paper

Fabrication of microfluidic paths using thick and vertical resist patterns printed by exposure with intentional large defocus

Yuta Morizane, Toshiyuki Horiuchi

Proceedings Volume 9658, 965816 (2015) https://doi.org/10.1117/12.2192936

KEYWORDS: Microfluidics, Semiconducting wafers, Thin films, Absorption, Lithography, Optical lithography, Photomasks, Printing, Light sources, Ultraviolet radiation

Read Abstract +

Proceedings Article | 28 June 2013 Paper

Projection exposure using a projector with highly minute liquid crystal display panels

Soichiro Koyama, Kenji Saito, Toshiyuki Horiuchi

Proceedings Volume 8701, 87010U (2013) https://doi.org/10.1117/12.2027570

KEYWORDS: LCDs, Projection systems, Optical lithography, RGB color model, Reticles, Printing, Light sources, Semiconducting wafers, Projection lithography, Microelectromechanical systems

Read Abstract +

Proceedings Article | 3 July 1995 Paper

Investigation and improvement of patterning characteristics for annular illumination optical lithography at the periodical pattern ends

Toshiyuki Horiuchi, Katsuhiro Harada, Yoshinobu Takeuchi, Yoshiaki Mimura, Emi Tamechika

Proceedings Volume 2512, (1995) https://doi.org/10.1117/12.212793

KEYWORDS: Lithographic illumination, Optical lithography, Lithography, Reticles, Diffraction, Resolution enhancement technologies, Semiconducting wafers, Holmium, Electromagnetic coupling, Projection systems

Read Abstract +