Prof. Toshiyuki Tsuchiya Profile

Prof. Toshiyuki Tsuchiya

Professor at Kyoto Univ

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Publications (1)

Proceedings Article | 18 March 2015 Paper

Optimization methods for 3D lithography process utilizing DMD-based maskless grayscale photolithography system

Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata

Proceedings Volume 9426, 94260F (2015) https://doi.org/10.1117/12.2084486

KEYWORDS: Photoresist materials, 3D microstructuring, Grayscale lithography, Photoresist developing, Optical lithography, Lithography, Digital micromirror devices, 3D acquisition, Error analysis, Standards development

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