Mr. Toshiyuki Yokosuka Profile

Toshiyuki Yokosuka

Researcher at Hitachi Ltd.

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Publications (3)

Proceedings Article | 26 May 2022 Poster + Paper

Fast generation of SEM images including charging effect by neural network

H. Du, T. Yokosuka, Y. Iwabuchi, M. Suzuki, Y. Aoki

Proceedings Volume 12053, 120531Y (2022) https://doi.org/10.1117/12.2613955

KEYWORDS: Scanning electron microscopy, Neural networks, Monte Carlo methods, Sensors, Evolutionary algorithms, Computer simulations, Image processing, Algorithm development, Visibility, Convolutional neural networks

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Proceedings Article | 13 March 2018 Paper

Developing a flexible model of electron scattering in solid for charging analysis

Chahn Lee, Toshiyuki Yokosuka, Hideyuki Kazumi

Proceedings Volume 10585, 105852E (2018) https://doi.org/10.1117/12.2297371

KEYWORDS: Scattering, Solids, Diffusion, Clouds, Monte Carlo methods, Scanning electron microscopy, Metals, Copper, Particles, 3D modeling

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Proceedings Article | 28 March 2017 Presentation + Paper

SEM image prediction based on modeling of electron-solid interaction

Toshimasa Kameda, Satoshi Takada, Makoto Suzuki, Toshiyuki Yokosuka, Sergey Borisov, Sergey Babin

Proceedings Volume 10145, 101451I (2017) https://doi.org/10.1117/12.2257661

KEYWORDS: Monte Carlo methods, Scanning electron microscopy, Image processing, Crystals, Electrons, Metrology, Inspection, Manufacturing, Scattering, Silica, Selenium, Laser scattering, Semiconductors

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