Mr. Travis A. Lott Profile

Travis A. Lott

Process Engineer Manager at SkyWater Technology Foundry

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Publications (1)

Proceedings Article | 5 April 2007 Paper

Sub-nanometer CD-SEM matching

Travis Lott, Russell Elias

Proceedings Volume 6518, 651838 (2007) https://doi.org/10.1117/12.712213

KEYWORDS: Semiconducting wafers, Image quality, Metrology, Liquid crystal lasers, Video, Scanning electron microscopy, Critical dimension metrology, Phase modulation, Time metrology, Visualization

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