Troy B. Morrison
at Thermo Fisher Scientific Inc
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 28 June 2005 Paper
Proc. SPIE. 5853, Photomask and Next-Generation Lithography Mask Technology XII
KEYWORDS: Metrology, Etching, Quartz, Dry etching, Chemistry, Chromium, Photomasks, Wet etching, Semiconducting wafers, Phase shifts

Proceedings Article | 6 December 2004 Paper
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Metrology, Sensors, Scanners, Microscopy, Atomic force microscopy, Precision measurement, 3D metrology, Photomasks, Critical dimension metrology, Edge roughness

Proceedings Article | 6 December 2004 Paper
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Metrology, Calibration, Etching, Quartz, Profilometers, Photomasks, Phase measurement, Laser metrology, Laser optics, Phase shifts

Proceedings Article | 20 August 2004 Paper
Proc. SPIE. 5446, Photomask and Next-Generation Lithography Mask Technology XI
KEYWORDS: Imaging systems, Signal attenuation, Etching, Quartz, Chromium, Ion beams, Process control, Photomasks, Phase shifts

Proceedings Article | 17 December 2003 Paper
Proc. SPIE. 5256, 23rd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Reticles, Etching, Quartz, Ions, Atomic force microscopy, Ion beams, Transmittance, Photomasks, Resolution enhancement technologies, Phase shifts

Showing 5 of 8 publications
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