Prof. Tsukasa Miyajima
at High Energy Accelerator Research Organization KEK
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 13 June 2022 Poster + Presentation
Proceedings Volume PC12051, PC120510S (2022) https://doi.org/10.1117/12.2613617
KEYWORDS: Lithography, Free electron lasers, Extreme ultraviolet, Stochastic processes, Physics, Optical resonators, Machine learning, Light sources, Laser development, Infrared radiation

Proceedings Article | 30 September 2021 Presentation
Proceedings Volume 11854, 118540M (2021) https://doi.org/10.1117/12.2600782
KEYWORDS: Free electron lasers, Lithography, Light sources, Extreme ultraviolet, Optical simulations, Laser development, Extreme ultraviolet lithography, Continuous wave operation, Stochastic processes, Scanners

Proceedings Article | 20 September 2020 Presentation
Proceedings Volume 11517, 115170R (2020) https://doi.org/10.1117/12.2573121
KEYWORDS: Light sources, Free electron lasers, Extreme ultraviolet lithography, Mid-IR, Photomask technology, Extreme ultraviolet, Stochastic processes, Electron beams, Mirrors, Magnetism

Proceedings Article | 16 October 2017 Presentation
Proceedings Volume 10450, 1045010 (2017) https://doi.org/10.1117/12.2280507
KEYWORDS: Light sources, Free electron lasers, Extreme ultraviolet, Semiconductors, Superconductors, EUV optics, Extreme ultraviolet lithography

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