For making a high-performance thermopile, which is a kind of cooling-free infrared sensor and composed of thermoelectric materials and capable of detecting infrared rays without electric power, we developed Si-Ge thin film thermoelectric materials. The thermal conductivity of the Si-Ge thermoelectric material was successfully reduced to 1 Wm-1K-1 by making use of nano-structuring. Besides, its Seebeck coefficient was effectively increased by a multi element doping technique. The thermopile constructed using the developed nanostructured Si-Ge was confirmed to sensitively detect infrared rays.We constructed gases detection system using the thermopile and an infrared laser and demonstrated its superior function.
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