Dr. Tsuyoshi Kondo Profile

Dr. Tsuyoshi Kondo

at Toshiba Corp

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Publications (1)

Proceedings Article | 13 March 2018 Paper

How to measure a-few-nanometer-small LER occurring in EUV lithography processed feature

Hiroki Kawada, Takahiro Kawasaki, Junichi Kakuta, Masami Ikota, Tsuyoshi Kondo

Proceedings Volume 10585, 1058526 (2018) https://doi.org/10.1117/12.2299969

KEYWORDS: Line edge roughness, Transmission electron microscopy, Extreme ultraviolet lithography, Extreme ultraviolet, Line width roughness, Metrology, Scanning electron microscopy, Manufacturing, Atomic layer deposition

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