Dr. Tzu-Ming Lu Profile

Dr. Tzu-Ming Lu

at Sandia National Labs

SPIE Involvement:

Author

Publications (2)

SPIE Journal Paper | 6 March 2021

Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques

Aaron Katzenmeyer, Sanja Dmitrovic, Andrew Baczewski, Quinn Campbell, Ezra Bussmann, Tzu-Ming Lu, Evan Anderson, Scott Schmucker, Jeffrey Ivie, Deanna Campbell, Daniel Ward, David Scrymgeour, George Wang, Shashank Misra

JM3 Vol. 20 Issue 01

Read Abstract +

DOWNLOAD PAPER

Proceedings Article | 23 March 2020 Presentation + Paper

Photothermal alternative to device fabrication using atomic precision advanced manufacturing techniques

A. Katzenmeyer, S. Dmitrovic, A. Baczewski, E. Bussmann, T.-M. Lu, E. Anderson, S. Schmucker, J. Ivie, D. Campbell, D. Ward, G. Wang, S. Misra

Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020

KEYWORDS: Lithography, Optical lithography, Silicon, Hydrogen, Manufacturing, Phosphorus, Pulsed laser operation, Scanning tunneling microscopy, Absorption

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years