Dr. Ulrich Breitmeier Profile

Dr. Ulrich Breitmeier

at Breitmeier Messtechnik GmbH

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Publications (2)

Proceedings Article | 10 September 2004 Paper

Fast scanning confocal sensor provides high-fidelity surface profiles on a microscopic scale

Anton Schick, Ulrich Breitmeier

Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.544689

KEYWORDS: Sensors, Confocal microscopy, Inspection, Light sources, Mirrors, Interfaces, Head, 3D image processing, Signal detection, Electronics

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Proceedings Article | 10 September 2004 Paper

Short coherence transmitted light interferometer for the thickness measurement of Si membranes

Ulrich Breitmeier, Klaus Leonhardt

Proceedings Volume 5457, (2004) https://doi.org/10.1117/12.544492

KEYWORDS: Silicon, Interferometers, Sensors, Infrared radiation, Interferometry, Mirrors, Beam splitters, Microelectromechanical systems, Optical simulations, Cameras

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