Prof. Ulrich Mescheder
Managing Director of the IAR at Hochschule Furtwangen Univ
SPIE Involvement:
Author
Publications (8)

SPIE Journal Paper | 21 January 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Silicon, Micromirrors, Mirrors, Electrodes, Semiconducting wafers, Distortion, Finite element methods, 3D modeling, Etching, Aluminum

Proceedings Article | 13 March 2013 Paper
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Oxides, Mirrors, Etching, Electrodes, Silicon, Distortion, 3D modeling, Finite element methods, Micromirrors, Semiconducting wafers

Proceedings Article | 5 May 2011 Paper
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Oxides, Capacitors, Silica, Etching, Electrodes, Silicon, 3D modeling, Capacitance, Aluminum, Semiconducting wafers

Proceedings Article | 25 November 2010 Paper
Proc. SPIE. 7376, Laser Applications in Life Sciences
KEYWORDS: Microfluidics, Polymethylmethacrylate, Polymers, Glasses, Silicon, Laser applications, Nd:YAG lasers, Optical tweezers, Plating, Ovary

Proceedings Article | 17 February 2010 Paper
Proc. SPIE. 7594, MOEMS and Miniaturized Systems IX
KEYWORDS: Mirrors, Electrodes, Silicon, Laser interferometry, Finite element methods, Micromirrors, Deep reactive ion etching, Nanoimprint lithography, Space operations, Semiconducting wafers

Showing 5 of 8 publications
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