Dr. Ulrike A. Dauderstädt
Group manager SLM Research at Fraunhofer-Institut für Photonische Mikrosysteme
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Publications (16)

SPIE Journal Paper | 21 September 2016
JM3 Vol. 15 Issue 03
KEYWORDS: Mirrors, Micromirrors, Laser irradiation, Spatial light modulators, Microelectromechanical systems, Transmission electron microscopy, Oxides, Pulsed laser operation, Optical lithography, Reflectivity

Proceedings Article | 7 March 2014 Paper
Proc. SPIE. 8977, MOEMS and Miniaturized Systems XIII
KEYWORDS: Spatial light modulators, Mirrors, Modulation, Imaging systems, Copper, Electrodes, Silica, Laser applications, Semiconductor lasers, Laser processing

Proceedings Article | 16 February 2012 Paper
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Mirrors, Modulators, Micromirrors, Electrodes, Laser applications, Continuous wave operation, Surface properties, Reflectivity, Microopto electromechanical systems, Printed circuit board testing

Proceedings Article | 14 February 2011 Paper
Proc. SPIE. 7930, MOEMS and Miniaturized Systems X
KEYWORDS: Mirrors, Micromirrors, Interferometers, Spatial light modulators, In situ metrology, Microopto electromechanical systems, Error analysis, Interferometry, Objectives, Phase shifts

Proceedings Article | 5 February 2010 Paper
Proc. SPIE. 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX
KEYWORDS: Mirrors, Temperature metrology, Convection, Micromirrors, Microopto electromechanical systems, Resistors, Calibration, Resistance, Photonic microstructures, Microsystems

Showing 5 of 16 publications
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