The results of Raman and SEM studies of Pd-carbonaceous films obtained by two methods are presented in this paper.
The first method is PVD (Physical Vapour Deposition) with two separated sources containing precursors for films (1 -
fullerenes C60, 2- palladium acetate). The second method consists of two steps, the first step being PVD followed by
CVD (Chemical Vapour Deposition) - the second step. In the first step a nanocrystalline Pd-C film is prepared. Later this
film is used to obtain a nanoporous Pd - carbonaceous film in the CVD process. Prepared films contain 8 - 34 %wt. Pd.
Both kinds of films were studied using Raman and SEM methods. For the films obtained in the two-step method SEM
images show porous structure for all samples. Raman spectra for the film with 8 % wt. Pd exhibit C60 characteristic
bands, while Raman spectra for films with higher content of Pd show D and G graphite characteristic bands. Films
obtained by PVD are structurally different from films obtained by 2-steps method which is reflected in SEM images
where no porous structure has been found.
The combination of an atomic force microscope (AFM) and a Confocal Raman Microscope (CRM) has been used to
study various surface coatings. The high spatial resolution of the AFM enables the morphological characterization of the
top layer of the coating with molecular resolution. Raman spectroscopy provides additional information on the chemical
composition of the coatings. In combination with a confocal microscope, the spatial distribution of the various phases
can be determined with a resolution down to 200 nm. Therefore, the topographically different structures observed in
AFM images can be associated to the chemical composition by using the Confocal Raman Microscope (CRM). In
addition, the confocal setup of the CRM provides insight into the multi-layer structure of coatings without laborious
sample preparation.
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