Dr. Uwe Leinhos
Scientist at MicroLiquids GmbH
SPIE Involvement:
Author
Publications (24)

Proceedings Article | 20 March 2018 Presentation
Proc. SPIE. 10587, Optical Microlithography XXXI
KEYWORDS: Wafer-level optics, Thermography, Optical components, Lithography, Deep ultraviolet, Image resolution, Wavefront sensors, Wavefronts, Adaptive optics, Absorption

Proceedings Article | 21 November 2017 Paper
Proc. SPIE. 10447, Laser-Induced Damage in Optical Materials 2017
KEYWORDS: Thermography, Antireflective coatings, Adaptive optics, Optical testing, Laser beam diagnostics

Proceedings Article | 31 October 2014 Paper
Proc. SPIE. 9237, Laser-Induced Damage in Optical Materials: 2014
KEYWORDS: Optical components, Mirrors, Aerospace engineering, Laser induced damage, Ultraviolet radiation, Laser development, Nd:YAG lasers, Reflectivity, Optical testing, Signal detection

Proceedings Article | 4 December 2012 Paper
Proc. SPIE. 8530, Laser-Induced Damage in Optical Materials: 2012
KEYWORDS: Optical components, Deep ultraviolet, Silica, Calibration, Quartz, Wavefronts, Adaptive optics, Thermal effects, Excimer lasers, Absorption

Proceedings Article | 28 November 2011 Paper
Proc. SPIE. 8190, Laser-Induced Damage in Optical Materials: 2011
KEYWORDS: Refractive index, Deep ultraviolet, Silica, Calibration, Wavefronts, Adaptive optics, Collimation, Laser beam diagnostics, Laser optics, Absorption

Showing 5 of 24 publications
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