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Victor Garkavy
President at Vigitek Inc
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Publications (1)
Proceedings Article | 15 February 1994 Paper
Laser repair of phase-shifting masks
Yung-Ho Chuang, Baorui Yang, Victor Garkavy, John O'Connor, Kuo-Ching Liu, Martin Cohen, J. Farkas, Paul Comita
Proceedings Volume 2087, (1994) https://doi.org/10.1117/12.167267
KEYWORDS: Objectives, Ultraviolet radiation, Etching, Quartz, Photomasks, Imaging systems, Bridges, Chromium, Photomask technology, Microscopes
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