Venkat R. Nagaswami
Director at KLA Corp
SPIE Involvement:
Author
Publications (12)

Proceedings Article | 19 March 2015 Paper
Proc. SPIE. 9423, Alternative Lithographic Technologies VII
KEYWORDS: Diffractive optical elements, Etching, Silicon, Inspection, Scanning electron microscopy, Bridges, Directed self assembly, Thin film coatings, Semiconducting wafers, Defect inspection

Proceedings Article | 2 April 2014 Paper
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Polymethylmethacrylate, Etching, Silicon, Inspection, Scanning electron microscopy, Scatterometry, Directed self assembly, Critical dimension metrology, Semiconducting wafers, Single crystal X-ray diffraction

Proceedings Article | 2 April 2014 Paper
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Wafer-level optics, Optical lithography, Defect detection, Inspection, Scanning electron microscopy, Wafer inspection, Directed self assembly, Epitaxy, Semiconducting wafers, Defect inspection

Proceedings Article | 28 March 2014 Paper
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Polymethylmethacrylate, Etching, Particles, Silicon, Inspection, Scanning electron microscopy, Directed self assembly, Critical dimension metrology, Semiconducting wafers, Defect inspection

Proceedings Article | 28 March 2014 Paper
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Wafer-level optics, Signal to noise ratio, Etching, Silicon, Inspection, Wafer inspection, Directed self assembly, Line edge roughness, Semiconducting wafers, Defect inspection

Showing 5 of 12 publications
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