Mr. Vijay A. Premnath Profile

Vijay A. Premnath

at Univ of Texas at Austin

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Publications (1)

Proceedings Article | 31 October 2022 Poster

EUV lithography using colloidal nanoparticles

Saurav Mohanty, Kun-Chieh Chien, Vijay A. Premnath, Chih-Hao Chang

Proceedings Volume PC12292, PC122920T (2022) https://doi.org/10.1117/12.2641139

KEYWORDS: Nanoparticles, Extreme ultraviolet lithography, Photoresist materials, Extreme ultraviolet, Silicon, Semiconducting wafers, Nanostructures, Nanolithography, Infrared lasers, Ultrafast phenomena

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