Dr. Vincent C. Geiszler Profile

Dr. Vincent C. Geiszler

Product Training Manager

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 24 May 2004 Paper

Characterization and control of sub-100-nm etch and lithography processes using atomic force metrology

Kirk Miller, Vincent Geiszler, Dean Dawson

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.533524

KEYWORDS: Etching, Metrology, 3D metrology, Semiconducting wafers, Critical dimension metrology, Lithography, Atomic force microscopy, Silicon, Algorithm development, Logic

Read Abstract +

Proceedings Article | 23 June 2000 Paper

Development of an i-line attenuated phase shift process for dual inlay interconnect lithography

John Sturtevant, Benjamin Ho, Vincent Geiszler, Matthew Herrick, Charles King, Russell Carter, Bernard Roman, Lloyd Litt, Brad Smith, Kirk Strozewski

Proceedings Volume 3999, (2000) https://doi.org/10.1117/12.388335

KEYWORDS: Photomasks, Phase shifts, Metals, Lithography, Optical lithography, Deep ultraviolet, Photoresist materials, Binary data, Dielectrics, Copper

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years