Ms. Virpi Korpelainen Profile

Virpi Korpelainen

at MIKES Mittatekniikan keskus

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Author

Publications (4)

SPIE Journal Paper | 28 February 2012

Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope

Virpi Korpelainen, Jeremias Seppä, Antti Lassila

JM3, Vol. 11, Issue 1, 011002, (February 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.1.011002

KEYWORDS: Calibration, Error analysis, Metrology, Atomic force microscopy, Interferometers, Atomic force microscope, Interferometry, Time metrology, Standards development, Statistical analysis

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Proceedings Article | 1 June 2011 Paper

Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological AFM

V. Korpelainen, J. Seppä, A. Lassila

Proceedings Volume 8036, 80360Q (2011) https://doi.org/10.1117/12.883818

KEYWORDS: Calibration, Error analysis, Atomic force microscopy, Metrology, Interferometers, Interferometry, Time metrology, Standards development, Refractive index, Scanners

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SPIE Journal Paper | 1 October 2004

Acoustic method for determination of the effective temperature and refractive index of air in accurate length interferometry

Virpi Korpelainen, Antti Lassila

OE, Vol. 43, Issue 10, (October 2004) https://doi.org/10.1117/12.10.1117/1.1787834

KEYWORDS: Temperature metrology, Refractive index, Acoustics, Humidity, Ultrasonography, Distance measurement, Interferometry, Interferometers, Protactinium, Sensors

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Proceedings Article | 20 November 2003 Paper

Acoustic method for the determination of the effective temperature and refractive index of air

Antti Lassila, Virpi Korpelainen

Proceedings Volume 5190, (2003) https://doi.org/10.1117/12.504468

KEYWORDS: Refractive index, Temperature metrology, Acoustics, Humidity, Ultrasonography, Transducers, Distance measurement, Interferometry, Interferometers, Time metrology

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