Dr. Vishal Sipani Profile

Dr. Vishal Sipani

Sr Manager at Micron Technology Inc

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Publications (2)

Proceedings Article | 26 March 2008 Paper

Characterization of array CD uniformity with respect to pattern density in 193nm dry photolithography

Vishal Sipani, David Kewley, Kaveri Jain, Erik Byers, Bruce Daybell, Anthony Krauth

Proceedings Volume 6923, 69233O (2008) https://doi.org/10.1117/12.773316

KEYWORDS: Reticles, Photoresist materials, Critical dimension metrology, Optical lithography, Photoresist processing, Fluorine, Semiconducting wafers, Polymers, Molecules, Diffusion

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Proceedings Article | 11 April 2006 Paper

Fundamental characterization of silicon-containing spin-on hardmask for 193nm photolithography

Vishal Sipani, Yoshi Hishiro, Mirzafer Abatchev

Proceedings Volume 6153, 61532U (2006) https://doi.org/10.1117/12.659102

KEYWORDS: Etching, Silicon, Plasmas, Chemical vapor deposition, Photoresist materials, Reflectivity, Oxides, Silicon carbide, Polymers, Semiconducting wafers

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