Dr. Viviana Agudelo
RET Engineer at Micron Tchnology Inc
SPIE Involvement:
Author
Area of Expertise:
Optics , Lithography , Computational Optics , Optoelectronics , Diffractive optics , Holography
Publications (6)

Proceedings Article | 15 March 2016 Paper
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Holograms, Holography, Optical lithography, Diffractive optical elements, Digital holography, Imaging systems, Scanning electron microscopy, Photoresist materials, Spatial light modulators, Maskless lithography, Optical design software, Optics manufacturing, Electro optical design, Information security, Design for manufacturability

SPIE Journal Paper | 2 December 2013
JM3 Vol. 13 Issue 01
KEYWORDS: Photomasks, Diffraction, Artificial neural networks, Data modeling, Optical lithography, Systems modeling, Lithography, Polarization, Neurons, Optical simulations

Proceedings Article | 12 April 2013 Paper
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Lithography, Diffraction, Optical lithography, Data modeling, Imaging systems, Artificial neural networks, Photomasks, Optical simulations, Performance modeling, Systems modeling

Proceedings Article | 13 March 2012 Paper
Proc. SPIE. 8326, Optical Microlithography XXV
KEYWORDS: Lithography, Diffraction, Optical filters, Polarization, Calibration, 3D modeling, Solids, Projection systems, Photomasks, Immersion lithography

Proceedings Article | 27 May 2011 Paper
Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII
KEYWORDS: Signal to noise ratio, Diffraction, Optical filters, Holograms, Digital holography, Spatial filters, Digital filtering, Fourier transforms, Optical simulations, Reconstruction algorithms

Showing 5 of 6 publications
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