Vladimir A. Petukhov
at National Research Univ of Electronic Technology
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 31 January 2022 Paper
Proceedings Volume 12157, 121570O (2022) https://doi.org/10.1117/12.2624651
KEYWORDS: Resistance, Annealing, Sensors, Platinum, Oxides, Tin, Bioalcohols, Oxygen, Sputter deposition, Nanoparticles

Proceedings Article | 30 December 2016 Paper
Vladislav Kravchenko, Vladimir Petukhov
Proceedings Volume 10224, 102242A (2016) https://doi.org/10.1117/12.2266745
KEYWORDS: Electrodes, Thin films, Silicon, Scanning tunneling microscopy, Thermoelectric materials, Oxides, Numerical simulations, Etching, Heat flux, Metals

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