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Volker Schmidt
at Berliner Glas GmbH
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Author
Publications (4)
Proceedings Article | 17 April 2014 Paper
Super-flat wafer chucks: from simulation and testing to a complete 300mm wafer chuck with low wafer deformation between pins
Renate Müller, Kanstantin Afanasiev, Marcel Ziemann, Volker Schmidt
Proceedings Volume 9048, 90482E (2014) https://doi.org/10.1117/12.2046209
KEYWORDS: Semiconducting wafers, Glasses, Manufacturing, Lithography, Particles, Thermal effects, 3D metrology, 3D modeling, Interferometers, Distortion
Proceedings Article | 23 March 2010 Paper
Characterization of the clamp pressure of electrostatic chucks
M. Ziemann, S. Voss, O. Baldus, V. Schmidt
Proceedings Volume 7636, 76362F (2010) https://doi.org/10.1117/12.839840
KEYWORDS: Semiconducting wafers, Glasses, Silicon, Dielectrics, Calibration, Electrodes, Interferometers, Reticles, Lithography, Semiconductors
Proceedings Article | 12 April 2005 Paper
Manufacturing of light weight laser mirror substrates with low thermal expansion
Volker Schmidt, Winfried Arens
Proceedings Volume 5708, (2005) https://doi.org/10.1117/12.591079
KEYWORDS: Mirrors, Manufacturing, Optics manufacturing, Surface finishing, Polishing, Lightweight mirrors, Silica, Adhesives, Laser applications, Space mirrors
Proceedings Article | 15 January 2003 Paper
Generation and application of opto-mechancial microstructures on glass
Volker Schmidt, Winfried Arens, Ulrich Kriems
Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.479559
KEYWORDS: Glasses, Semiconducting wafers, Etching, Ion beams, Wet etching, Reactive ion etching, Photomasks, Semiconductors, Polymethylmethacrylate, Surface finishing
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