Dr. Walan C. Grizolli
Scientist, EUV Optics at KLA Corp
SPIE Involvement:
Author
Area of Expertise:
X-ray optics , Ray tracing simulations , Instrumentation for synchrotron radiation beamlines , Wavefront propagation
Publications (6)

Proceedings Article | 9 September 2019 Presentation
Proc. SPIE. 11108, Advances in X-Ray/EUV Optics and Components XIV
KEYWORDS: Optical components, Light sources, X-ray optics, Diamond, Polishing, X-rays, X-ray diffraction, Surface roughness, Laser cutting, Free electron lasers

Proceedings Article | 9 September 2019 Presentation + Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Diffraction, Monochromatic aberrations, Mirrors, Sensors, Crystals, X-rays, Wavefront sensors, Wavefronts, Adaptive optics, Optical alignment, Hard x-rays

Proceedings Article | 9 September 2019 Presentation
Proc. SPIE. 11108, Advances in X-Ray/EUV Optics and Components XIV
KEYWORDS: Mirrors, Optical design, X-ray optics, Diamond, Metrology, X-rays, Microfabrication, Laser metrology, Optics manufacturing, X-ray technology

Proceedings Article | 9 September 2019 Presentation + Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: X-ray optics, Metrology, Lenses, X-rays, Interferometry, Wavefronts, Data acquisition, Beryllium, Near field optics, Data analysis

Proceedings Article | 7 September 2017 Paper
Proc. SPIE. 10385, Advances in Metrology for X-Ray and EUV Optics VII
KEYWORDS: Metrology, Phase contrast, Speckle, Interferometers, X-rays, Interferometry, Wavefront sensors, Wavefronts, Near field, X-ray imaging

Showing 5 of 6 publications
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