Dr. Walter J. Trybula
Retired at Trybula Foundation Inc
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 10 June 2015 Paper
Proc. SPIE. 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII
KEYWORDS: Packaging, Nanosensors, Gas sensors, Sensors, Data storage, Polymers, Telecommunications, Microsensors, Environmental sensing, Prototyping

SPIE Journal Paper | 1 January 2005
JM3 Vol. 4 Issue 01
KEYWORDS: Lithography, Optical lithography, Birefringence, Optics manufacturing, Crystals, Manufacturing, Photomasks, Pellicles, Chemical elements, Silica

SPIE Journal Paper | 1 January 2005
JM3 Vol. 4 Issue 01

Proceedings Article | 6 December 2004 Paper
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Optical lithography, Etching, Manufacturing, Inspection, Reflectivity, Chromium, Photomasks, Extreme ultraviolet lithography, Semiconducting wafers, Yield improvement

Proceedings Article | 6 December 2004 Paper
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Contamination, Air contamination, Particles, Ions, Manufacturing, Chromium, Pellicles, Photomasks, Semiconducting wafers, Mask cleaning

Showing 5 of 15 publications
Conference Committee Involvement (2)
Photomask Technology
9 September 2003 | Monterey, California, United States
Photomask Technology
1 October 2002 | Monterey, CA, United States
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