Warren Montgomery
at Irresistible Materials
SPIE Involvement:
Conference Program Committee | Author
Area of Expertise:
Lithography , Photoresist , Process Development , Business Development
Publications (41)

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11326, Advances in Patterning Materials and Processes XXXVII
KEYWORDS: Carbon, Etching, Silicon, Resistance, Fullerenes

Proceedings Article | 25 March 2019 Presentation + Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Carbon, Polymethylmethacrylate, Etching, Hydrogen, Nitrogen, Resistance, Chemical vapor deposition, Plasma etching, Fullerenes, System on a chip

Proceedings Article | 13 March 2018 Presentation + Paper
Proc. SPIE. 10586, Advances in Patterning Materials and Processes XXXV
KEYWORDS: Carbon, Optical properties, Etching, Fullerenes

Proceedings Article | 16 October 2017 Presentation
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Metals, Molecules, Diffusion, Extreme ultraviolet, Line edge roughness, Stochastic processes, Chemically amplified resists

Proceedings Article | 24 March 2017 Paper
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Optical lithography, Contamination, Metals, Molecules, Ions, Manufacturing, Photoresist materials, Extreme ultraviolet lithography, High volume manufacturing, Line edge roughness

Showing 5 of 41 publications
Proceedings Volume Editor (2)

SPIE Conference Volume | 24 September 2010

SPIE Conference Volume | 23 September 2009

Conference Committee Involvement (15)
Advances in Patterning Materials and Processes XXXVIII
22 February 2021 | Online Only, California, United States
Photomask Technology 2015
29 September 2015 | Monterey, California, United States
Photomask Technology 2014
16 September 2014 | Monterey, California, United States
SPIE Photomask Technology
10 September 2013 | Monterey, California, United States
Photomask Technology
11 September 2012 | Monterey, California, United States
Showing 5 of 15 Conference Committees
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