Dr. Wayne C. Lo Profile

Dr. Wayne C. Lo

System Electron Optics Engineer at PDF Solutions Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 14 June 1999 Paper

Productive application of voltage contrast for detection of optically undetectable defects

Christopher Talbot, Richard Barnard, John Jamieson, Chiwoei Lo, Pierre Perez, Andy Pindar

Proceedings Volume 3677, (1999) https://doi.org/10.1117/12.350835

KEYWORDS: Semiconducting wafers, Defect detection, Inspection, Optical inspection, Control systems, Magnetism, Image processing, Wafer-level optics, Objectives, Sensors

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Proceedings Volume Editor (1)

SPIE Conference Volume | 28 November 1983

Tunable Diode Laser Development and Spectroscopy Applications

Conference Committee Involvement (1)

Tunable Diode Laser Development and Spectroscopy Applications

23 August 1983 | San Diego, United States

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