CONFERENCE PROCEEDINGS
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Wei Cheng Wang
Engineer in System Integration at National Tsing Hua Univ
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Publications (5)
Proceedings Article | 21 September 2011 Paper
Common path optical design for 2D inspection system with the capability of auto-focusing
Wei Cheng Wang, Shih-Hsuan Kuo, Leh-Rong Chang, Hau-Wei Wang
Proceedings Volume 8167, 81670J (2011) https://doi.org/10.1117/12.897267
KEYWORDS: Inspection, Image sensors, Confocal microscopy, Colorimetry, Sensors, Light sources, Image processing, Optical design, Dispersion, Switches
Proceedings Article | 24 August 2010 Paper
Using chromatic confocal apparatus for in situ rolling thickness measurement in hot embossing process
Yi-Chang Chen, Shu-Ping Dong, Chun-Chieh Wang, Shih Hsuan Kuo, Wei Cheng Wang, Hung-Ming Tai
Proceedings Volume 7767, 77670P (2010) https://doi.org/10.1117/12.860565
KEYWORDS: Confocal microscopy, Colorimetry, Light sources, Sensors, Nanoimprint lithography, Spectroscopy, Image sensors, Objectives, Lithography, Inspection
Proceedings Article | 17 June 2009 Paper
Auto-focusing in the scanning white-light interferometer
Proceedings Volume 7389, 73892S (2009) https://doi.org/10.1117/12.827456
KEYWORDS: Inspection, Interferometers, Optical inspection, Actuators, Charge-coupled devices, Light sources, Beam splitters, Ferroelectric materials, Sensors, Algorithm development
Proceedings Article | 15 September 2008 Paper
Large-scale 3-D profilometer
Proceedings Volume 7073, 70732J (2008) https://doi.org/10.1117/12.803008
KEYWORDS: Beam splitters, Interferometers, 3D metrology, Profilometers, 3D image processing, 3D image reconstruction, Light sources, Inspection, Objectives, Mirrors
Proceedings Article | 11 August 2008 Paper
3D profilometer employing white-light interferometry for microstructures with large-bevel inclines in brightness-enhanced films
Wei Cheng Wang, Yan Jen Su, Shih Hsuan Kuo
Proceedings Volume 7063, 70630Z (2008) https://doi.org/10.1117/12.797595
KEYWORDS: Interferometers, 3D image processing, 3D metrology, 3D microstructuring, Interferometry, Calibration, Objectives, Image processing, Profilometers, Prisms
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