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Wei Dong
at Univ of Connecticut
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Publications (1)
Proceedings Article | 7 April 2009 Paper
Precision tracking control of dual-stage actuation system for optical manufacturing
W. Dong, J. Tang
Proceedings Volume 7288, 72882D (2009) https://doi.org/10.1117/12.816209
KEYWORDS: Actuators, Control systems, Device simulation, Optics manufacturing, Servomechanisms, Feedback control, Prototyping, System identification, Sensors, Solids
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