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Wei Li
at Colorado State Univ
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 7 March 2014 Paper
Periodic nanostructures fabricated by Talbot extreme ultraviolet lithography
W. Li, D. Patel, C. Menoni, A. Stein, W. Chao, E. Anderson, M. Marconi
Proceedings Volume 8973, 89730D (2014) https://doi.org/10.1117/12.2041688
KEYWORDS: Photomasks, Lithography, Nanostructures, Nanolithography, Extreme ultraviolet lithography, Extreme ultraviolet, Imaging systems, Nanoimprint lithography, Photoresist materials, X-ray optics
Proceedings Article | 27 September 2013 Paper
Coherent nanopatterning with table-top soft x-ray lasers
W. Li, V. Martinez Esquiroz, D. Patel, L. Urbanski, C. Menoni, J. Rocca, A. Stein, W. Chao, E. Anderson, M. Marconi
Proceedings Volume 8849, 88490W (2013) https://doi.org/10.1117/12.2024472
KEYWORDS: Photomasks, Lithography, Nanolithography, Nanostructures, X-ray lasers, Photoresist materials, Extreme ultraviolet, Coherence imaging, Printing, Imaging systems
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