Dr. Wei Wei Profile

Dr. Wei Wei

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Publications (1)

Proceedings Article | 18 November 2019 Paper

A new method for non-destructive measuring of grating parameters

Bilali Muhutijiang, Wei Wei, Keqiang Qiu

Proceedings Volume 11188, 1118825 (2019) https://doi.org/10.1117/12.2537840

KEYWORDS: Diffraction gratings, Scanning electron microscopy, Diffraction, Nondestructive evaluation, Atomic force microscopy, Data modeling, Distance measurement, Microscopes, Physics, Electronics engineering

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