Multimode Interference (MMI) based devices are widely used due to excellent performance. Here in this paper, a 1×2
multimode power splitter based on MMI is designed using three-dimensional beam propagation method (3D-BPM), and
then fabricated in glass using the Ag+-Na+ ion-exchange technique. The width of the input and output multimode
waveguides was 50μm and they were tapered to 75μm at the interface to the MMI region. The MMI region was also
quadratically tapered .First, Ag+-Na+ ion exchange was run in nitrate melt at 350°C.Then an electric field was applied at
300°C so that the silver ions continued their migration award. Under the wavelength of 1550nm, the measured results
showed that the propagation loss of multimode straight waveguide can be lower than 0.31dB/cm, and the insertion loss
and uniformity of the splitter were 4.28dB and 0.21dB, respectively. Parameters of the fabrication process and structure
of the device can be optimized to improve the performance of the device.
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