The emerging dual-focus lenses are drawing increasing attention recently due to their wide applications in both academia and industries, including laser cutting systems, microscopy systems, and interferometer-based surface profilers. In this paper, a miniature electrically tunable rotary dual-focus lens is developed. Such a lens consists of two optical elements, each having an optical flat surface and one freeform surface. The two freeform surfaces are initialized with the governing equation Ar2θ (A is the constant to be determined, r and θ denote the radii and angles in the polar coordinate system) and then optimized by ray tracing technique with additional Zernike polynomial terms for aberration correction. The freeform surfaces are achieved by a single-point diamond turning technique and then a PDMS-based replication process is utilized to materialize the final lens elements. To drive the two coaxial elements to rotate independently, two MEMS thermal rotary actuators are developed and fabricated by a standard MUMPs process. The experimental results show that the MEMS thermal actuator provides a maximum rotation angle of about 8.2 degrees with an input DC voltage of 6.5 V, leading to a wide tuning range for both the two focal lengths of the lens. Specifically, one focal length can be tuned from about 30 mm to 20 mm while the other one can be adjusted from about 30 mm to 60 mm.
This paper describes the design and electro-mechanical characterizations of a three-axial micro piezoresistive force sensor fabricated by microelectromechanical systems (MEMS) technologies. This is the first three-axial MEMS micro force sensor applied to the study of Micro Aerial Vehicle (MAV) aerodynamics. A standard dry etching fabrication process using Silicon On Insulator (SOI) wafer is employed to fabricate the multi-axis sensors. Conventional cross-beam structure is employed. There are eight piezoresistors on the beams, and each of the silicon strain gauge size is 15 μm in width, and between 400 and 500 μm in length. The Finite Element Method (FEM) analysis for confirming the piezoresistors attachment locations is performed. The miniaturized force sensor (11×11 mm2) is attached at the wing base of a micro flapping wing system (MAV, 70×30 mm2 ) by a short pillar. The sensor is designed to detect the dynamic drag force and lift force generated by a single wing under a moderate flapping frequency (5~10Hz) simultaneously. The characterizations are experimentally investigated. The sensor should be stiff enough to withstand the high inertial force (200 millinewton) and also has high resolution to detect the minimal force correctly. Measurements show that the resolution is on the order of a millinewton. High linearity and low hysteresis under normal forces and tangential forces are demonstrated by applying forces from 0 to 0.1 N. The micro flapping wing mechanism and the assembly of wing and sensor are also discussed in this paper.
We present the use of polyacrylate membranes for the fabrication of pneumatically actuated variable lenses. Whereas the most commonly used membrane material for tunable liquid-filled lenses is polydimethylsiloxane (PDMS), polyacrylate membranes have the advantages of high resistance to swelling in silicone oil and enhanced compatibility with a wide range of aqueous optical liquids. These features are quantitatively demonstrated by comparing the material properties and performance of PDMS and polyacrylate membrane lenses. The optical transparency of polyacrylate is more than 92%. The surface roughness is below 3.3 nm rms, and reversible elastic deformation could be demonstrated. Optical measurements show that the cutoff frequency of the modulation transfer function of polyacrylate lenses with different liquid fillings, using a reference contrast of 0.2, is more than 1.5 times larger than that of the same system assembled with PDMS membranes filled with water.