Dr. Weidong Yang Profile

Dr. Weidong Yang

Scientist at Tokyo Electron America Inc

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Publications (2)

Proceedings Article | 2 June 2003 Paper

Novel diffraction-based spectroscopic method for overlay metrology

Weidong Yang, Roger Lowe-Webb, Silvio Rabello, Jiangtao Hu, Je-Yi Lin, John Heaton, Mircea Dusa, Arie den Boef, Maurits van der Schaar, Adolph Hunter

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483476

KEYWORDS: Overlay metrology, Diffraction, Diffraction gratings, Semiconducting wafers, Spectroscopy, Optical alignment, Imaging systems, Metrology, Error analysis, Optical design

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Proceedings Article | 16 July 2002 Paper

Line-profile and critical-dimension correlation between a normal-incidence optical CD metrology system and SEM

Weidong Yang, Roger Lowe-Webb, Rahul Korlahalli, Vera Zhuang, Hiroki Sasano, Wei Liu, David Mui

Proceedings Volume 4689, (2002) https://doi.org/10.1117/12.473425

KEYWORDS: Critical dimension metrology, Scanning electron microscopy, Semiconducting wafers, Photoresist materials, Diffraction gratings, Diffraction, Reflectivity, Finite element methods, Spectroscopy, Polarizers

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