Dr. Weilun Chao
Research Scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Author
Publications (48)

Proceedings Article | 21 August 2020 Paper
Proc. SPIE. 11490, Interferometry XX
KEYWORDS: Light sources, Metrology, Spatial frequencies, Interferometers, Calibration, Zoom lenses, Modulation transfer functions, Binary data, Fizeau interferometers

Proceedings Article | 23 March 2020 Presentation + Paper
Proc. SPIE. 11323, Extreme Ultraviolet (EUV) Lithography XI
KEYWORDS: Mirrors, Image processing, Scanners, Scanning electron microscopy, Projection systems, Vibration isolation, Semiconducting wafers, Camera shutters

Proceedings Article | 9 September 2019 Presentation + Paper
Proc. SPIE. 11109, Advances in Metrology for X-Ray and EUV Optics VIII
KEYWORDS: Diffraction, Monochromatic aberrations, Mirrors, Sensors, Crystals, X-rays, Wavefront sensors, Wavefronts, Adaptive optics, Optical alignment, Hard x-rays

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Diffraction, Monochromatic aberrations, Optical design, Sensors, Interferometry, Wavefronts, Multiplexing, Optical alignment, Diffraction gratings, Shearing interferometers

Proceedings Article | 26 March 2019 Paper
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Microscopes, Diffraction, Mirrors, Sensors, Image sensors, Photomasks, Extreme ultraviolet, Charge-coupled devices, CCD image sensors, Fiber optic illuminators

Showing 5 of 48 publications
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