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Prof. Wen Jin Meng
at Louisiana State Univ
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 22 January 2005 Paper
UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications
Proceedings Volume 5717, (2005) https://doi.org/10.1117/12.592640
KEYWORDS: Plating, Nickel, Lithography, Electroplating, Photomasks, Polishing, Diffraction, Prototyping, Microelectromechanical systems, Photoresist processing
Proceedings Article | 15 January 2003 Paper
Embossing of microscale features in Pb and Zn
Dean Guidry, Dong Mei Cao, Tao Wang, Wen Jin Meng, Kevin Kelly
Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.472758
KEYWORDS: Nickel, Zinc, Lead, Metals, Scanning electron microscopy, X-rays, Fabrication, Plasma, Ceramics, Polymethylmethacrylate
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