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Dr. Wengang Wu
at Peking Univ
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Author
Publications (1)
Proceedings Article | 30 December 2004 Paper
Torsion-mirror optical actuators with compound driving structures
Wengang Wu, Qinghua Chen, Guizhen Yan, Yilong Hao
Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.576590
KEYWORDS: Mirrors, Actuators, Micromirrors, Optical actuators, Silicon, Semiconducting wafers, Etching, Analog electronics, Telecommunications, Optical switching
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