Mr. Wenkang Song Profile

Wenkang Song

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Publications (2)

Proceedings Article | 26 May 2022 Poster + Paper

Computational metrology introduction into high volume manufacturing fab through 1x nm uDBO measurement and monitor

Chia Hung Chen, Wenkang Song, Hongwei Zhu, Sheng-Tsung Tsao, Jie Du

Proceedings Volume 12053, 120531M (2022) https://doi.org/10.1117/12.2612486

KEYWORDS: Overlay metrology, Semiconducting wafers, Metrology, High volume manufacturing, Scanners, Data modeling, Stars, Lithography, Contamination, Optimization (mathematics)

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Accuracy aware pixel selection in multi-wavelength uDBO metrology enables higher robustness and accuracy for DRAM

Chia Hung Chen, Sheng-Tsung Tsao, Jie Du, Wenkang Song, Hongwei Zhu, Ji-Ling Hou, Longfei Shen, Sunny Xia, Simon Mathijssen, Marc Noot, Farzad Farhadzadeh, Kimi Yang, Xing Ma, Zhi-Qiang Tang, Jing Wang, Yu Liu, David Xu, Herman Heijmerikx, Eason Su, Elliott Mc Namara, Kaustuve Bhattacharyya

Proceedings Volume 11611, 116112Z (2021) https://doi.org/10.1117/12.2583818

KEYWORDS: Metrology, Overlay metrology, High volume manufacturing, Front end of line, Detection and tracking algorithms

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