Mr. Wenming Wu Profile

Wenming Wu

at Siemens EDA

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Publications (2)

Proceedings Article | 12 October 2021 Presentation + Paper

Characterization of mask CD mean-to-target for hotspot patterns by using SEM image contours

Kan Zhou, Xin Guo, Yinsheng Yu, Hongwen Zhao, Wenzhan Zhou, Yu Zhang, Ao Chen, Wenming Wu, Qijian Wan, Huaiyang Dou, Chunshan Du, Liguo Zhang, Germain Fenger

Proceedings Volume 11855, 118550E (2021) https://doi.org/10.1117/12.2601674

KEYWORDS: Photomasks, Scanning electron microscopy, Optical proximity correction, Semiconducting wafers, Feature extraction, Critical dimension metrology, Metrology, OLE for process control, Image quality, Image processing

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Proceedings Article | 22 February 2021 Presentation + Paper

Contour-based process characterization, modeling, and control for semiconductor manufacturing

Kan Zhou, Xin Guo, Wenzhan Zhou, Qijian Wan, Chunshan Du, Wenming Wu, Ao Chen, Recoo Zhang, Germain Fenger, Seshadri Rampoori, Bhamidipati Samir

Proceedings Volume 11611, 1161113 (2021) https://doi.org/10.1117/12.2591300

KEYWORDS: Process modeling, Semiconductor manufacturing, Control systems, Statistical analysis, Scanning electron microscopy, Process control, Calibration

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